Science 347, 14231424 (2015). Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The left inset shows the orientation of the LN crystal where the optical axis is along the z direction. Lithium niobate photonic-crystal electro-optic modulator. This work demonstrates the first (to the best of our knowledge) thin film lithium niobate electro-optic modulator operating at a wavelength of 1064 nm. a is the lattice constant. That highlighted in blue indicates the large metal pad used for contacting the RF probe. Optica 4, 12511258 (2017). Google Scholar. Opt. Express 26, 1481014816 (2018). Low power 50Gb/s silicon traveling wave MachZehnder modulator near 1300nm. 27 March 2023, Receive 51 print issues and online access, Get just this article for as long as you need it, Prices may be subject to local taxes which are calculated during checkout. PubMed The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. Coherent modulation up to 100 GBd 16QAM using silicon-organic hybrid (SOH) devices. Marpaung, D., Yao, J. Here the modulator is analyzed in a dual-drive design shown in Figure 1 (where V1 = -V2). Schmidt, R. V. & Kaminow, I. P. Metal-diffused optical waveguides in LiNbO3. IEEE Photonics Technol. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. NTT Tech. Lithium niobate piezo-optomechanical crystals. If material is not included in the articles Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. This work is supported in part by National Science Foundation (NSF) (EFMA-1641099, ECCS-1810169, and ECCS-1842691); the Defense Threat Reduction Agency-Joint Science and Technology Office for Chemical and Biological Defense (grant No. The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. 1a) since it supports compact optical and electrical integration to enhance the electro-optic response. Google Scholar. Ayata, M. et al. Integrated lithium niobate electro-optic modulators operating at CMOS Photon-level tuning of photonic nanocavities. High-speed Pockels modulation and second-order nonlinearities are key components in optical systems, but CMOS-compatible platforms like silicon and silicon nitride lack these capabilities. M.Z. ADS ADS Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. a Schematic of half of the cross-section of the EOM structure. We are also able to achieve high-speed electro-optic switching of at 11Gbs1, with switching energy as low as 22fJ per bit. We expect that these optimization would significantly improve the energy efficiency of the LN photonic-crystal EOM, further decreasing the switching energy down to sub-femtoJoule level. Near-field enhancement of optical second harmonic generation in hybrid 1e) to achieve a critical coupling. 12, 1700256 (2018). Phys. CAS 1e and 2). This is a typical signature of resonance modulation in the sideband-unresolved regime, where the cavity resonance follows adiabatically the electric driving signal in a sinusoidal fashion, resulting in a broadened average transmission spectrum (Fig. This work is supported in part by the National Science Foundation (NSF) (ECCS1609549, ECCS-1740296 E2CDA and DMR-1231319) and by Harvard University Office of Technology Development (Physical Sciences and Engineering Accelerator Award). Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in VOA variable optical attenuator, MZI MachZehnder interferometer, EDFA erbium-doped fiber amplifier, BPF bandpass filter, MNA, microwave network analyzer, PRBS pseudo-random binary sequence source. 94, 241107 (2009). Our EO modulators use MgO-doped lithium niobate for high power operation. Here, we report an EO lithium niobate metasurface mediated by topological corner states. Javid, U. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. 2 High-speed measurement set-ups. High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro IEEE J. Sel. The images or other third party material in this article are included in the articles Creative Commons license, unless indicated otherwise in a credit line to the material. J. Lightwave Technol. Aoki, M. et al. volume562,pages 101104 (2018)Cite this article. Nat. 35, 346396 (2017). The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. 1e) to enable a partial reflection/transmission, with the hole number optimized for a critical coupling to the cavity. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. Lithium Niobate Nonlinear Thermal Waveguide MODE Automation API Nonlinear Optics Photonic Integrated Circuits - Active Computing Second-harmonic generation (SHG) in a Lithium Niobite - LiNbO3 (LNO) nanophotonic waveguide is studied using temperature modulation to achieve efficient phase matching. and JavaScript. Hybrid Silicon and Lithium Niobate Modulator Abstract: Hybrid Lithium Niobate (LN) and Silicon photonic (SiPh) integration platform has emerged as a promising candidate to combine the scalability of silicon photonics with the excellent modulation performance of LN. 6, 488503 (2012). and A.S. fabricated the devices. Thinfilm lithium niobate (TFLN) has been widely used in electrooptic modulators, acousticoptic modulators, electrooptic frequency combs and nonlinear wavelength converters owing to the. When the EOM is driven at a modulation frequency of 600MHz much smaller than the cavity linewidth of 1.4GHz, increasing the driving power simply broadens the transmission spectrum into one with two shallow side lobes, as shown in Fig. Light Sci. 25, 458460 (1974). 8b, increasing the thickness, tw, of the wing layer will improve the electro-optic tuning since it enhances the amplitude of the driving electric field inside the LN photonic-crystal cavity. Modern advanced photonic integrated circuits require dense integration of high-speed electro-optic functional elements on a compact chip that consumes only moderate power. . Wooten, E. L. et al. Thin-lm lithium niobate on insulator (LNOI) platform. When the modulation frequency is below 1.0GHz, The transmission spectrum remains fairly similar regardless of modulation frequency, as expected from the adiabatic driving discussed above. The device exhibits a resonance at 1554.47nm, which corresponds to the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) (Fig. PubMedGoogle Scholar. We provide a standard modulator package, as well as customized modulator chips, packages and services for integration . 6, 488503 (2012). On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. The electro-optic modulation demonstrated in the previous section indicates the potential high-speed operation of the EOMs. The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform.. Figure7a shows the electro-optic modulation response of the device (blue curve), which exhibits a 3-dB modulation bandwidth up to around 17.5GHz. Long haul telecommunication networks, data center optical interconnects, and microwave photonic systems all rely on lasers to generate an optical carrier used in data transmission. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. Opt. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. Such a configuration reduces the critical requirement of electrode alignment as needed in . J. Lightwave Technol. Low V silicon photonics modulators with highly linear epitaxially grown phase shifters. Express 23, 2307223078 (2015). Scaling an EOM down to a small footprint would reduce the device capacitance and thus decrease the switching energy27,28, which is indispensable for all practical applications. supervised the project. Rev. 11, 441446 (2017). Express 26, 2372823739 (2018). By 2026, the global lithium niobate modulator market is estimated to surpass US$36.711 billion by 2026, increasing from US$6.568 billion from 2018. High-quality lithium niobate photonic crystal nanocavities. 35, 346396 (2017). Reed, G. T., Mashanovich, G., Gardes, F. Y. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. 38, 33383345 (2020). J. Lightwave Technol. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. Folded thin-film lithium niobate modulator based on a poled Mach Liu, J. et al. Correspondence to Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. Photon. 1a, d). CAS For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. High modulation efficiency lithium niobate Michelson interferometer modulator. & Wang, A. X. Article For example, LNOI phase modulators with relatively low Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Express 21, 2700327010 (2013). Ayata, M. et al. d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. 6, 6982 (2000). Opt. In the meantime, to ensure continued support, we are displaying the site without styles Internet Explorer). ADS Nat. Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . Electron-plasmon interaction on lithium niobate with gold nanolayer and its field distribution dependent modulation. b The structure of the unit cell (top: top view; bottom: cross-sectional view). Quantum Electron. Dong, P. et al. PSI offers ultra-high-speed lithium niobate phase modulators. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. Lithium Niobate Phase Modulators - Phase Sensitive Innovations d Recorded transmission spectra at different RF modulation frequencies varying from 0.4 to 3.0GHz, with a frequency step of 0.2GHz. a Recorded transmission spectra of the \({\mathrm{{TE}}}_{01}^{0}\) cavity mode with RF driving signal at seven different powers from 0 to 12mW, with a power step of 2mW, modulated at 0.6GHz. In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems, fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. Figure2 shows a fabricated device (see Methods for the details of device fabrication). It was supported by the Defense Advanced Research Projects Agency under grant HR0011-20-C-0137 and the Air Force Office of Scientific Research under grant FA9550-19-1-0376. a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. Nat. Figure 1: Dual-drive system layout High performance thin-film lithium niobate modulator on a silicon Nature (Nature) 42.25.p. Miller, D. A. Google Scholar. You are using a browser version with limited support for CSS. Ogiso, Y. et al. All of these applications require chip-scale electro-optic modulators that operate at voltages compatible with complementary metaloxidesemiconductor (CMOS) technology, have ultra-high electro-optic bandwidths and feature very low optical losses. IEEE J. Sel. Rep. 7, 46313 (2017). 16, 185191 (2010). Weigel, P. O. et al. Chen, X. et al. PubMed Acousto-optical modulation of thin film lithium niobate waveguide devices. PubMed Central Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. Nat. Li, M., Ling, J., He, Y. et al. We realize an intensity modulator of 12.5 mm long modulation section, which exhibits a low half-wave voltage of 1.7 V and a large 3 dB modulation bandwidth of >70 GHz. Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z Science 361, 13581363 (2018). EDFA, erbium-doped fibre amplifier; FPC, fibre-polarization controller; MZM, MachZehnder modulator (commercial); OSA, optical spectrum analyser; VOA, variable optical attenuator. C.W., M.Z., X.C., P.W. Res. Opt. Nat. By combining thin-film lithium niobate devices with high-power lasers using an industry-friendly process, this research represents a key step towards large-scale, low-cost, and high-performance transmitter arrays and optical networks. Li, M., Liang, H., Luo, R., He, Y. High-speed electro-optic modulation underlies many important applications ranging from optical communication1, microwave photonics2, computing3, frequency metrology4 to quantum photonics5. Lithium niobate photonic-crystal electro-optic modulator 100GHz siliconorganic hybrid modulator. Lithium niobate etching is not required for making the hybrid optical waveguides. Sorting out light. The high efficiency of electro-optic tuning together with the high optical quality of the EOM resonator enables efficient electrical driving of the optical mode into different dynamic regimes. Top. In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Express 26, 220232 (2018). The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. Wideband thin-film lithium niobate modulator with low half-wave-voltage length product. Xinlun Cai, of Sun Yat -sen University, led a team that designed and fabricated a thin-film lithium niobate (TFLN) dual polarization in-phase and quadrature (DP-IQ) modulator, which sets new world . fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. IEEE J. Quantum Electron. The individual column at the left of each plot indicates the case when tw=0m and gap=2.5m, for a device with full surrounding air cladding. In 2015 IEEE Compound Semiconductor Integrated Circuit Symposium 14 (2015); https://doi.org/10.1109/CSICS.2015.7314513, Letal, G. et al. Thin-film lithium niobate (TFLN) based traveling-wave modulators maintain simultaneously excellent performances, including large modulation bandwidth, high extinction ratio, low optical loss, and high modulation efficiency. Topics As an example application, we demonstrate electro-optic switching of non-return-to-zero (NRZ) signal at a rate of 11Gbs1, with a switching energy as low as 22fJ per bit that is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. Phys. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. The pure linear electro-optic tuning shown in Fig. Femtojoule electro-optic modulation using a siliconorganic hybrid device. To maximize the electro-optic interaction, we utilize a partially etched structure with a rib-waveguide-like cross-section, leaving a 150-nm-thick wing layer for the electrodes to sit on (Fig. Quant. A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. Nat. 1a), where an injector section (Fig. Optica 1, 112118 (2014). Chen, L., Wood, M. G. & Reano, R. M. 12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. Google Scholar. J. Lightwave Technol. Lett. Light is coupled into and out of the EOM chip via one lensed fiber. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. LiNbO. This is a preview of subscription content, access via your institution. A typical design requires a full air cladding to improve the optical quality factor43,45,46. The scale bar on the left represents the strength of normalized electrical field (Enorm) for d, f, g. The photonic-crystal cavity is oriented along the y-axis such that the dominant optical field is in parallel with the optical axis of underlying LN medium (Fig. Jian, J. et al. 5 Comparison of integrated and conventional LN modulators. Express 19, 75307536 (2011). Optica 4, 15361537 (2017). Google Scholar. ADS Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. Technol. OBrien, J. L. Optical quantum computing. Quant. The 50-m width of the electrode (Fig. performed numerical simulations. Photonics 13, 8090 (2019). As such, the photonic-crystal mirror on the right side of the defect cavity is designed to be of 100% reflection, while that on the left side has decreased number of holes (Fig. @article{Ghosh2023WaferscaleHI, title={Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces}, author={Siddhartha Ghosh and Siva Yegnanarayanan and Dave Kharas and Matthew Ricci and Jason Plant and Paul W. Juodawlkis}, journal={Optics Express}, year . The authors declare no competing interests. Broadband modulation of light by using an electro-optic polymer. The key modulation waveguide structure is a field-enhanced slot waveguide formed by embedding silicon nanowires in a thin-film lithium niobate (LN), which is different from the previously . increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. Mercante, A. J. et al. & Capmany, J. Opt. B 97, 104105 (2018). This value can be improved in the future by further optimizing the partially reflective photonic-crystal mirror (Fig. wrote the manuscript with contribution from all authors. 3 Electrical eye diagram at 100Gbaud. Recently, there have been significant advance in high-Q LN photonic-crystal nanoresonators43,44,45,46, which led to the demonstration of intriguing phenomena and functionalities such as photorefraction quenching43, harmonic generation44, piezo-optomechanics45, and all-optical resonance tuning46. All-electronic 100-GHz bandwidth digital-to-analog converter generating PAM signals up to 190Gbaud. Top. Opt. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. Microstructure and domain engineering of lithium niobate crystal films & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. Appl. Nozaki, K. et al. Review and perspective on ultrafast wavelength-size electro-optic modulators. The current generation of lithium niobate modulators are bulky, expensive, limited in bandwidth and require high drive voltages, and thus are unable to reach the full potential of the material. For direct CMOS driving, the RF amplifier is bypassed. & Thomson, D. J. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro . Song, M., Zhang, L., Beausoleil, R. G. & Willner, A. E. Nonlinear distortion in a silicon microring-based electro-optic modulator for analog optical links. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210 gigabits per second and show an on-chip optical loss of less than 0.5 decibels. DOI: 10.1364/OL.426083 Abstract L V cm, and the 3 dB electro-optical bandwidth is about 55 GHz. Upconversion of light from its fundamental wavelength (FW) to its second harmonic (SH) is enhanced 32 in micron-scale lithium niobate (LiNbO3) spheres through near-field interactions with gold . Photonics 4, 518526 (2010). a Full SEM image of the whole-device structure. Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. This mode, however, has only negligible perturbation to the dielectric mode due to distinctive spatial symmetry, thus not affecting the quality of the defect cavity mode. Light Sci. Opt. By placing the metal electrodes on top and bottom of the waveguide rather than the usual lateral configuration, the electric field is fully overlapping the optical field. Opt. C.W., M.Z. Express 20, 2246522474 (2012). The device also exhibits a second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\) (Fig. Wood, M. G. et al. We achieve this by engineering the microwave and photonic circuits to achieve high electro-optical efficiencies, ultra-low optical losses and group-velocity matching simultaneously. The fully on-chip design achieves a full-swing extinction ratio of 11.5dB. Lithium niobate, as a traditional multifunctional material, has stimulated a photonics revolution as silicon did for electronics. Zhang, X. et al. 1f), so as to take the advantage of the largest electro-optic component r33 of LN.

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